Nkọwa
Otu kristal Silicon Ingotis na-etolitekarị dị ka a nnukwu cylindrical ingot site ziri ezi doping na ịdọrọ teknụzụ Czochralski CZ, Magnetik ubi kpaliri Czochralski MCZ na Floating Mpaghara FZ ụzọ.Usoro CZ bụ nke a na-ejikarị eme ihe maka uto kristal silicon nke nnukwu ingots cylindrical na dayameta ruo 300mm ejiri na ụlọ ọrụ eletrọnịkị mee ngwaọrụ semiconductor.Usoro MCZ bụ mgbanwe nke usoro CZ nke oghere magnetik mepụtara site na electromagnet, nke nwere ike nweta mkpokọta oxygen dị ala n'otu n'otu, itinye uche na-adịghị ọcha, mgbakasị ala na mgbanwe mgbanwe edo edo.Usoro FZ na-akwado mmezu nke ihe mgbochi dị elu karịa 1000 Ω-cm na kristal dị ọcha nke nwere obere oxygen.
Nnyefe
Single Crystal Silicon Ingot CZ, MCZ, FZ ma ọ bụ FZ NTD nwere n-ụdị ma ọ bụ p-ụdị conductivity na Western Minmetals (SC) Corporation nwere ike nyefee na size nke 50mm, 75mm, 100mm, 125mm, 150mm na 200mm dayameta (2, 3). , 4, 6 na 8 inch), nghazi <100>, <110>, <111> na n'elu ala na ngwugwu nke plastic akpa n'ime na katọn igbe n'èzí, ma ọ bụ dị ka ahaziri nkọwapụta iru zuru okè ngwọta.
.
Nkọwa nka nka
Single Crystal Silicon Ingot CZ, MCZ, FZ ma ọ bụ FZ NTDnwere n-ụdị ma ọ bụ p-ụdị conductivity na Western Minmetals (SC) Corporation nwere ike nyefee na size nke 50mm, 75mm, 100mm, 125mm, 150mm na 200mm dayameta (2, 3, 4, 6 na 8 inch), nghazi <100 >, <110>, <111> na n'elu ala na ngwugwu nke akpa rọba n'ime ya na igbe katọn n'èzí, ma ọ bụ dị ka ahaziri nkọwapụta iru zuru okè ngwọta.
Mba. | Ihe | Nkọwa ọkọlọtọ | |
1 | Nha | 2 ", 3", 4", 5", 6", 8 ", 9.5", 10 ", 12" | |
2 | Dayameta mm | 50.8-241.3, ma ọ bụ dị ka achọrọ | |
3 | Uzo uto | CZ, MCZ, FZ, FZ-NTD | |
4 | Ụdị omume | P-ụdị / boron doped, N-ụdị / Phosphide doped ma ọ bụ Un-doped | |
5 | Ogologo mm | ≥180 ma ọ bụ dị ka achọrọ | |
6 | Nhazi | <100>, <110>, <111> | |
7 | Nguzogide Ω-cm | Dị ka achọrọ | |
8 | Ọdịnaya Carbon a/cm3 | ≤5E16 ma ọ bụ dị ka achọrọ | |
9 | Ọdịnaya oxygen a/cm3 | ≤1E18 ma ọ bụ dị ka achọrọ | |
10 | Metal Mmetọ a/cm3 | <5E10 (Cu, Cr, Fe, Ni) ma ọ bụ <3E10 (Al, Ca, Na, K, Zn) | |
11 | Nkwakọ ngwaahịa | Akpa rọba n'ime, akpa plywood ma ọ bụ igbe katọn n'èzí. |
Akara | Si |
Nọmba Atọmic | 14 |
Atọmk Ibu | 28.09 |
Otu n'ime ihe | Metalloid |
Otu, Oge, Mgbochi | 14, 3, P |
Ọdịdị kristal | diamond |
Agba | Agba ntụ ntụ |
Ebe Na-agbaze | 1414°C, 1687.15 K |
Ebe esi nri | 3265°C, 3538.15 K |
Njupụta na 300K | 2.329 g/cm3 |
Resistivity dị n'ime | 3.2E5 Ω-cm |
Nọmba CAS | 7440-21-3 |
Nọmba EC | 231-130-8 |
Otu kristal Silicon Ingot, mgbe kpamkpam toro ma ruo eruo ya resistivity, adịghị ọcha ọdịnaya, crystal izu okè, size na ịdị arọ, na-n'ala site na iji diamond wheel mee ka ọ a zuru okè cylinder ka nri dayameta, mgbe ahụ na-enweta etching usoro iji wepụ n'ibu ntụpọ hapụrụ site egweri usoro. .Mgbe nke ahụ gasịrị, a na-egbutu ingot cylindrical n'ime blocks nwere ogologo ụfọdụ, ma nye ya notch na isi ma ọ bụ nke abụọ dị larịị site na sistemụ njikwa wafer na-akpaghị aka maka nhazi iji chọpụta nhazi kristal na conductivity tupu usoro slicing wafer ala.
Atụmatụ ịzụ ahịa
Otu kristal Silicon Ingot