Nkọwa
FZ Single Crystal Silicon Wafer,Mpaghara Float (FZ) Silicon bụ silicon dị ọcha nke ukwuu nke nwere oke ikuku oxygen na ikuku carbon nke teknụzụ na-eme ka mpaghara kwụ ọtọ kwụpụtara.Mpaghara FZ Floating bụ otu usoro ingot kristal na-eto eto nke dị iche na usoro CZ ebe a na-etinye kristal mkpụrụ n'okpuru polycrystalline silicon ingot, na oke n'etiti kristal mkpụrụ na polycrystalline kristal na-agbaze site na RF mkpuchi mkpuchi mkpuchi maka otu crystallization.Igwe mkpuchi RF na mpaghara gbazere na-aga n'ihu, otu kristal na-esikwa ike n'elu kristal mkpụrụ ahụ.A na-ahụta silicon silịkọn-mpaghara na nkesa dopant edo edo, mgbanwe mgbochi dị ala, machibido oke adịghị ọcha, ogologo oge ndụ ihe na-ebu ibu, ebumnuche mgbochi dị elu yana silicon dị ọcha.Silikoni nke mpaghara float bụ ihe ọzọ dị oke ọcha na kristal toro site na usoro Czochralski CZ.Site na njirimara nke usoro a, FZ Single Crystal Silicon dị mma maka iji na-emepụta ngwaọrụ eletrọnịkị, dị ka diodes, thyristors, IGBTs, MEMS, diode, RF ngwaọrụ na ike MOSFET, ma ọ bụ dị ka mkpụrụ maka akụkụ dị elu ma ọ bụ ihe nchọpụta anya. , ngwaọrụ ike na sensọ, elu arụmọrụ anyanwụ cell wdg.
Nnyefe
FZ Single Crystal Silicon Wafer N-ụdị na P-ụdị conductivity na Western Minmetals (SC) Corporation nwere ike nyefee na nha nke 2, 3, 4, 6 na 8 inch (50mm, 75mm, 100mm, 125mm, 150mm na 200mm) na nghazi <100>, <110>, <111> na elu imecha nke As-cut, Lapped, etched na polished na ngwugwu nke ụfụfụ igbe ma ọ bụ cassette na katọn igbe n'èzí.
Nkọwa nka nka
FZ Single Crystal Silicon Waferma ọ bụ FZ Mono-crystal Silicon Wafer nke intrinsic, n-ụdị na p-ụdị conductivity na Western Minmetal Corporation (SC) Corporation nwere ike nyefee n'ụdị dị iche iche nke 2, 3, 4, 6 na 8 inch na dayameta (50mm, 75mm, 100mm , 125mm, 150mm na 200mm) na dịgasị iche iche nke ọkpụrụkpụ si 279um ruo 2000um na <100>, <110>, <111> nghazi na elu imecha nke dị ka-ịkpụ, lapped, etched na polished na ngwugwu nke ụfụfụ igbe ma ọ bụ cassette. ya na igbe katọn n'èzí.
Mba. | Ihe | Nkọwa ọkọlọtọ | ||||
1 | Nha | 2" | 3" | 4" | 5" | 6" |
2 | Dayameta mm | 50.8±0.3 | 76.2±0.3 | 100±0.5 | 125±0.5 | 150±0.5 |
3 | Omume omume | N/P | N/P | N/P | N/P | N/P |
4 | Nhazi | <100>, <110>, <111> | ||||
5 | Ọkpụrụkpụ μm | 279, 381, 425, 525, 575, 625, 675, 725 ma ọ bụ dị ka achọrọ | ||||
6 | Nguzogide Ω-cm | 1-3, 3-5, 40-60, 800-1000, 1000-1400 ma ọ bụ dị ka achọrọ | ||||
7 | RRV kacha | 8%, 10%, 12% | ||||
8 | TTV μm max | 10 | 10 | 10 | 10 | 10 |
9 | Ụta/Warp μm max | 30 | 30 | 30 | 30 | 30 |
10 | Emecha elu elu | Dị ka-ịkpụ, L/L, P/E, P/P | ||||
11 | Nkwakọ ngwaahịa | Igbe ụfụfụ ma ọ bụ cassette n'ime, igbe katọn n'èzí. |
Akara | Si |
Nọmba Atọmic | 14 |
Atọmk Ibu | 28.09 |
Otu n'ime ihe | Metalloid |
Otu, Oge, Mgbochi | 14, 3, P |
Ọdịdị kristal | diamond |
Agba | Agba ntụ ntụ |
Ebe Na-agbaze | 1414°C, 1687.15 K |
Ebe esi nri | 3265°C, 3538.15 K |
Njupụta na 300K | 2.329 g/cm3 |
Resistivity dị n'ime | 3.2E5 Ω-cm |
Nọmba CAS | 7440-21-3 |
Nọmba EC | 231-130-8 |
FZ Single Crystal Silicon, na njirimara kachasị nke usoro Float-zone (FZ), bụ ihe dị mma maka iji na-emepụta ngwaọrụ eletrọnịkị, dị ka diodes, thyristors, IGBTs, MEMS, diode, RF ngwaọrụ na ike MOSFET, ma ọ bụ dị ka mkpụrụ maka mkpebi dị elu. ahụ ma ọ bụ ihe nchọta anya, ngwaọrụ ike na ihe mmetụta, elu arụmọrụ anyanwụ cell wdg.
Atụmatụ ịzụ ahịa
FZ Silicon Wafer